BIOMEDE 5667
Transcript Abbreviation:
BioMEMS Microfab
Course Description:
A detailed overview of microfabrication technologies, including silicon microfabrication, polymer microfabrication, and advanced microfabrication topics, with application to specific MEMS and BioMEMS devices.
Course Levels:
Undergraduate (1000-5000 level)
Graduate (5000-8000 level)
Designation:
Elective
General Education Course:
(N/A)
Cross-Listings:
(N/A)
Credit Hours (Minimum if “Range”selected):
3.00
Max Credit Hours:
3.00
Select if Repeatable:
Off
Maximum Repeatable Credits:
3.00
Total Completions Allowed:
(N/A)
Allow Multiple Enrollments in Term:
No
Course Length:
14 weeks (autumn or spring)
12 weeks (summer only)
Off Campus:
Never
Campus Location:
Columbus
Instruction Modes:
In Person (75-100% campus; 0-24% online)
Prerequisites and Co-requisites:
Prereq: Sr or Grad standing in Engineering, or permission of instructor.
Electronically Enforced:
No
Exclusions:
(N/A)
Course Goals / Objectives:
Produce a microfabrication protocol for BioMEMS devices
Identify BioMEMS device requirements and determine the materials which will be best able to satisfy those requirements
Identify the strengths and weaknesses of common microfabrication techniques
Apply MEMS technology to the measurement, simulation, and enhancement of biological systems
Check if concurrence sought:
No
Contact Hours:
| Topic | LEC | REC out-of-class | REC in-class | Weekly LAB out-of-class | Weekly LAB in-class |
|---|---|---|---|---|---|
| Introduction and materials for microfabrication | 2.0 | 0.0 | 0 | 0.0 | 0 |
| Silicon microfabrication | 4.0 | 0.0 | 0 | 0.0 | 0 |
| Polymer microfabrication | 4.0 | 0.0 | 0 | 0.0 | 0 |
| Advanced microfabrication and packaging | 4.0 | 0.0 | 0 | 0.0 | 0 |
| Characterization techniques for BioMEMS | 4.0 | 0.0 | 0 | 0.0 | 0 |
| Case study: micro-gyroscope | 8.0 | 0.0 | 0 | 0.0 | 0 |
| Case study: micromotors and comb drives | 8.0 | 0.0 | 0 | 0.0 | 0 |
| Case study: cell force measurement with BioMEMS | 8.0 | 0.0 | 0 | 0.0 | 0 |
| Total | 42 | 0 | 0 | 0 | 0 |
Grading Plan:
Letter Grade
Course Components:
Lecture
Grade Roster Component:
Lecture
Credit by Exam (EM):
No
Grades Breakdown:
| Aspect | Percent |
|---|---|
| Homework | 30% |
| Midterm exam | 25% |
| Final exam | 35% |
| In class performance | 10% |
Representative Textbooks and Other Course Materials:
| Title | Author | Year |
|---|---|---|
| Fundamental of Microfabrication: The Science of Miniaturization | Marc J. Madou |
ABET-CAC Criterion 3 Outcomes:
(N/A)
ABET-ETAC Criterion 3 Outcomes:
(N/A)
ABET-EAC Criterion 3 Outcomes:
(N/A)
Embedded Literacies Info: